Functional Materials Group – MATE (Thin Films and Surfaces Laboratory)

      The laboratory consists of a clean room class 1000, equipped with a direct write system to perform photolithography.

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Research:

Currently the laboratory has three lines of research, which are:

• Structures for spin-polarized current injection in semiconductor materials;
• Structures for Spin-Valves;
• Structures for semiconductor electrical characterization.

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Structure:

• Laserwhiter mPG 101 Heidelberg – Structures down to 1.0 μm – Substrates up to 10cm;
• Sputtering to thin films/ contact deposition. Equipped with 2 guns (DC and RF) and 6 targets (Au, Cu, Co, MgO, Al₂O, CoFe).

Auxiliaries:

• Hot plate;
• Spin-coater;
• Ultrasonic bath;
• Thermal bath;
• Exhaust hood;
• Dehumidifier;
• Desiccator;
• Refrigerator.

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Contact:

Prof. Cristiani Campos Plá Cid: cristiani.campos@ufsc.br (Coordinator)

Prof. André Pasa: pasa@fisica.ufsc.br

Phone: (48) 3721-2303

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Scheduling:

Requests to use the facilities should be sent via email to cristiani.campos@ufsc.br or deise.schafer@ufsc.br, including the purpose of use, the equipment required, and the estimated time of use. Based on this information, the facilities will be made available on the nearest available date.

Operating Schedule

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